Global Sources
EE Times-Asia
Stay in touch with EE Times Asia
?
EE Times-Asia > T&M
?
?
T&M??

Capacitance manometer retrofit kits for AMAT 8100/8300 etch systems

Posted: 05 Oct 2001 ?? ?Print Version ?Bookmark and Share

Keywords:mks? manometer? baratron? pressure? transducer?

This application note describes heated manometer models as suitable replacements for the original problem-vulnerable MKS Type 370 Baratron sensor.

View the PDF document for more information.



Article Comments - Capacitance manometer retrofit kits ...
Comments:??
*? You can enter [0] more charecters.
*Verify code:
?
?
Webinars

Seminars

Visit Asia Webinars to learn about the latest in technology and get practical design tips.

?
?
Back to Top