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Sensors/MEMS??

A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support

Posted: 09 May 2002 ?? ?Print Version ?Bookmark and Share

Keywords:micromachining? fpi? scm? flat diaphragm? interferometer?

This application note describes the function and applications of a Fabry-Perot interferometeran optical element consisting of two partially reflecting, low loss, parallel mirrors separated by a gap.

View the PDF document for more information.



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