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NTT nanofabrication uses electron beam lithography

Posted: 09 Feb 2004 ?? ?Print Version ?Bookmark and Share

Keywords:nippon telegraph and telephone? ntt? electron beam lithography system?

Nippon Telegraph and Telephone (NTT) Corp. has created an electron beam lithography system that enables the fabrication of small three-dimensional structures with sizes measured in nanometers.

The company has demonstrated the 3D nanopatterning and nanofabrication by exposing a small sphere to the EB to form what the company claims as the world's smallest globe. The technique hopes to become the technological foundation of nanotechnology.





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