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Ultratech sells LSA tools to Asian foundry

Posted: 26 Oct 2010 ?? ?Print Version ?Bookmark and Share

Keywords:laser spike anneal? LSA? foundry?

Ultratech Inc. has announced that a "top-tier" Asian foundry has placed a "significant multi-system, follow-on order" for its laser spike anneal (LSA) tools to be used in its 45nm production ramp.

The LSA100A systems are based on Ultratech's customizable Unity Platform, which "provides considerable cost-of-ownership advantages and operational flexibility to process various product types without negatively impacting yield. Ultratech said delivery of the LSA systems will begin in the fourth quarter of 2010.

Ultratech's LSA systems are used by logic foundries in advanced annealing applications, driven by growing demand for smartphones, PCs, tablets, and other devices in ever-shrinking form factors.

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