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Air Products opens Korea fab

Posted: 09 Jun 2011 ?? ?Print Version ?Bookmark and Share

Keywords:electronics fab? manufacturing? dielectric?

Air Products has announced that its new electronic materials facility in Banwol, Korea has completed startup and is successfully on-line. The newly commercialized materials produced in this facility will enable semiconductor manufacturers to create advanced generation devices.

As device geometries continue to shrink in size, there are increasing needs for new dielectric materials to address process needs such as lower thermal budget, and filling of nanometer scale features. The Banwol facility enables flexible manufacturing of a wide variety of new dielectric products.

"The new materials produced at our Banwol facility, such as our AP-LTO and AP-LTN product lines, will enable deposition of silicon nitride and oxide films by Atomic Layer Deposition (ALD), Plasma Enhanced Atomic Layer Deposition (PEALD) and Chemical Vapor Deposition (CVD) for a variety of emerging applications including spacers, sacrificial films, protection layers, etch stops, and diffusion barriers," commented John Langan, director of technology and electronics at Air Products.

The materials manufactured in the Banwol facility will be incorporated into devices such as NAND Flash memory for portable electronics, DRAM to boost computer operating systems, advanced logic applications, and telecom applications like smartphones. In most cases, Air Products' new materials are jointly developed with industry leading tool suppliers and semiconductor manufacturers.

"Air Products is excited to be investing in the next generation materials our customers need to help develop cutting-edge portable devices, such as smartphones and tablet computers, now entering the market," said Corning Painter, vice president and general manager at Electronics for Air Products. "Air Products continues to be the leading supplier to the semiconductor, TFT-LCD and photovoltaic manufacturers on account of our technological advancements and ability to locate and grow with our customers."





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