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TSMC to start EUV lithography
Posted:?Sep 19, 2011 10:36 AM

In two weeks, TSMC will start using its first extreme ultraviolet machine....[ View complete article ]


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TSMC to start EUV lithography

Posted:? Sep 19, 2011 10:36 AM
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Author:Windsound

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In two weeks, TSMC will start using its first extreme ultraviolet machine.
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EETimes Asia : Step-down DC/DC converters yield output voltage up to 15V
(1) Reply:TSMC to start EUV lithography Posted:? Sep 19, 2011 10:36 AM
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Author:Windsound

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It sounds the battle of nm-generation between TSMC & GF
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EETimes Asia : Calculating a resistor-capacitor snubber
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Reply: TSMC to start EUV lithography

Posted:? Oct 13, 2011 4:36 PM
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Author:Visitor 4345

These are not production machines. Don't expect these to be used in high volume manufacturing any time soon. The throughput of the current machines is 10 wafers per hour, to be economic they need to have at least 100 wafers per hour throughput.
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