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Accurately controlling the load lock vent cycle using Baratron capacitance manometer technology

Posted: 05 Oct 2001 ?? ?Print Version ?Bookmark and Share

Keywords:mks? atmospheric switch? manometer? baratron? pressure?

This application note presents a solution on how to control load lock venting with the use of MKS Type 41 atmospheric switch.

View the PDF document for more information.



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