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Capacitance manometer retrofit kits for AMAT 8100/8300 etch systems

Posted: 05 Oct 2001 ?? ?Print Version ?Bookmark and Share

Keywords:mks? manometer? baratron? pressure? transducer?

This application note describes heated manometer models as suitable replacements for the original problem-vulnerable MKS Type 370 Baratron sensor.

View the PDF document for more information.

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