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Determining photomask etch endpoint with the CETAC EP-2000

Posted: 11 Oct 2001 ?? ?Print Version ?Bookmark and Share

Keywords:cetac? ep 2000? etch? plasma etch? photomask etch?

This application note discusses the use of the CETAC EP-2000-4 Plasma Diagnostic and Endpoint System to determine endpoint for almost all photomask etches.

View the PDF document for more information.

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