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Oki Electric ships fully depleted SOI LSIs

Posted: 18 Feb 2002 ?? ?Print Version ?Bookmark and Share

Keywords:oki electric? silicon-on-insulator? soi? lsi? rf device?

Oki Electric Ind. Co. Ltd has commenced commercial shipment in volume what it claims to be the first fully depleted silicon-on-insulator (SOI) LSIs. The company said the devices are based upon the technologies it developed to allow the stable production of semiconductor devices on SOI wafers. According to Oki Electric, the fully depleted SOI-based LSIs are manufactured on very thin silicon layers of less than 50nm, using Unibond SOI wafers manufactured by Soitec.

Currently, the company is applying the technology in RF devices for short-distance wireless communications. The commercialization of such RF devices is expected to begin March next year.

"By combining Oki's expertise in wireless, communications and information-systems technologies with SOI technology, our target is to promote our SOI business by focusing on mobile and personal-information terminal markets," said Fumio Ichikawa, general manager of Oki's VLSI research center, in a statement. "In 2004, Oki intends to manufacture $75.1 million worth of SOI-based LSIs at Miyagi Oki Electric, a wholly owned subsidiary."

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