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MEMSCAP rolls out MEMS-based microwave filters

Posted: 19 Apr 2002 ?? ?Print Version ?Bookmark and Share

Keywords:microwave filter? mems microwave filter? lmds filter? automotive radar filter?

MEMSCAP SA has developed what it claims to be the first commercially-available MEMS-based microwave filter for use in local multipoint distribution services (LMDS), and is aimed at reducing the size and cost of customer premise equipment.

Traditional premise equipment required manual assembly of large waveguides involving costly "touch-labor" for manually tuning the passband. The MEMS-based filters cut the cost of LMDS systems by using silicon substrates and suspended coplanar-to-microstrip structures, eliminating the large waveguides and additional labor.

"MEMSCAP's filter technology takes wireless engineering one step closer to this long-sought goal. LMDS is the first natural implementation for the technology. We see great potential for many applications based on the reduced cost, size, and weight of MEMS filters," said Didier Lacroix, VP and GM, MEMSCAP Wireless Business Unit.

Aside from LMDS, the filters can be used in automotive radar and space-born applications, all of which fall within the 18GHz to 90GHz range.

Available in hybrid or SMT packaging, the LMDS filters are capacitively end-coupled resonators on a suspended dielectric membrane, with edge-coupled section of the microstrip line used as a transformer coupling to the filter to set the external quality factor.

The filter process includes resistive silicon substrates, gold electroplating, etching on the backside of the wafer under the resonator, and suspension of a dielectric membrane. Shielding cavities are used to increase the unloaded quality factor.





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