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TCE adopts Numerical's Virtual Stepper for photomask inspection

Posted: 26 Apr 2002 ?? ?Print Version ?Bookmark and Share

Keywords:Toppan Chunghwa? Virtual Stepper System? photomask? subwavelength design?

Taiwan-based photomask manufacturer Toppan Chunghwa Electronics (TCE) has incorporated Numerical Technologies' Virtual Stepper System into its photomask manufacturing process. TCE is using Virtual Stepper to analyze and classify defects on photomasks containing subwavelength design features to maximize yield while minimizing cost and turn-around-time.

TCE is also currently involved in a partnership with Numerical for its i-Virtual Stepper, the network-enabled capability that connects users in mask shops and fabs on a global scale to review results and communicate in real time.





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