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TSMC to use KLA-Tencor test systems for its Fab 12

Posted: 26 Apr 2002 ?? ?Print Version ?Bookmark and Share

Keywords:KLA-Tencor? Klarity Defect? automated analysis? IC? wafer?

Taiwan Semiconductor Mfg Co. (TSMC) has selected KLA-Tencor Corp.'s Klarity Defect automated analysis and defect data management system for its Fab 12, which manufactures advanced ICs on 300mm wafers.

Klarity Defect is expected to provide automated analysis of defect data generated by KLA-Tencor's wafer inspection and review systems, and defect classification tools. This analysis enables chip manufacturers to take corrective action and improve their yields more quickly.

According to I-Lu Wu, defect section manager at TSMC's Fab 12, Klarity Defect was selected primarily for the its reliability, support, extendibility and ease of integration. "We have purchased Klarity Defect and implemented it in our Fab 12 for defect analysis in the 300mm production environment,'' stated Wu.

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