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Sensors/MEMS??

Atomic force profilometry for characterization of chemical mechanical planarization

Posted: 25 Mar 2002 ?? ?Print Version ?Bookmark and Share

Keywords:wafer? cmp? semiconductor? afm? topography?

This application note discusses how the Vx AFP is able to characterize topography of CMP wafers comprehensively.

View the PDF document for more information.



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