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Coherent to develop lasers for ISMT

Posted: 24 Jun 2002 ?? ?Print Version ?Bookmark and Share

Keywords:International SEMATECH? lasers? photomasks?

Coherent Inc. has received a multi-year contract from International SEMATECH (ISMT) for lasers used in the development of advanced photomasks. The multi-year agreement commissions Coherent to develop laser systems at wavelengths below 200nm which are required to fabricate advanced photomasks for the sub-70nm technology nodes.

ISMT is a global semiconductor technology development consortium that represents the semiconductor manufacturing industry on innovation issues. ISMT's role in this contract is to ensure the timely availability of photomask materials, tools, and technology needed by its member companies and for the industry to stay on the International Technology Roadmap for Semiconductors (ITRS).

"Photomask cost and cycle time are acute issues for advanced microelectronics manufacturers. The development of a critical laser light source will be an enabling component for multiple equipment applications in the production of advanced photomasks, from pattern generation to defect inspection and metrology," said Kurt R. Kimmel, Mask Strategy program manager for ISMT.

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