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Sensors/MEMS??

The fabrication and use of micromachined, corrugated silicon diaphragms

Posted: 09 May 2002 ?? ?Print Version ?Bookmark and Share

Keywords:micromachine? flat diaphragm? valve diaphragm? fabrication? pressure sensor?

This application note discusses the fabrication and use of micromachined, corrugated silicon diaphragms.

View the PDF document for more information.



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