Sensors/MEMS??
A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support
Keywords:micromachining? fpi? scm? flat diaphragm? interferometer?
This application note describes the function and applications of a Fabry-Perot interferometeran optical element consisting of two partially reflecting, low loss, parallel mirrors separated by a gap.
View the PDF document for more information.
View the PDF document for more information.
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