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Mass production technology of large size III-V compound semiconductor expitaxial wafers for microwave devices by MOVPE

Posted: 20 Jun 2002 ?? ?Print Version ?Bookmark and Share

Keywords:movpe wafer? microwave device wafer? phemt wafer? hbt? hetero bipolar transistor?

This application note describes the mass production techniques for large diameter MOVPE wafers for microwave devices.

View the PDF document for more information.

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