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Advanced Energy adopts PSI sensors into its EPM system

Posted: 19 Jul 2002 ?? ?Print Version ?Bookmark and Share

Keywords:Pacific Scientific Instruments? HYT PM-450? sensor? bus controller? Symphony Equipment Productivity Manager?

Advanced Energy Ind. Inc. (AE) has successfully integrated Pacific Scientific Instruments' (PSI) HYT PM-450 sensor bus controller into its Symphony Equipment Productivity Manager (EPM) system. AE's EPM provides connectivity, data collection, data storage, and analysis software to enable customers to improve overall equipment productivity.

The integration of PSI's HYT in-situ sensors was facilitated by both the open architecture of the Symphony technology and by the use of HYT PM-450 Ethernet connectivity. To date, AE has integrated three sensors into the Symphony EPM, the HYT vacuum particle sensor, a Peak Sensor Systems optical emission spectrometer (OES), and AE's Z-Scan RF sensor.

"Because our Symphony products can easily accommodate sensors from any source, we can provide critical sensor and tool data management for real-time process control and e-Diagnostics," said Joe Monkowski, SVP, AE. "The inherent time resolution of in-situ sensors combined with tool context information provides critical insight into the process, thereby reducing our customers' time-to-yield, and enabling them to meet their customers' increasing time-to-market demands."





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