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ATMI purchases copper delivery system from Microbar

Posted: 25 Jul 2002 ?? ?Print Version ?Bookmark and Share

Keywords:Microbar? Copper 2.0 Suite Delivery? Waste Recovery System? electrochemical deposition? copper?

ATMI Inc. has purchased Microbar Inc.'s Copper 2.0 Suite Delivery and Waste Recovery System product line for advanced electrochemical deposition of copper.

According to Microbar, the Copper 2.0 chemical management system ensures chemical preservation by integrating high purity delivery to, and safe recovery of spent material from the copper deposition tool. The system consisting of reinforced polypropylene, offers chemical pumping or pressure dispensing techniques with high purity PFA or PVDF wetted components.

"The Copper 2.0 delivery system joins ATMI's CuChem copper bath analysis tool in our overall strategy to create complete material management solutions, in this case, the copper electroplating process tool," said Tom Talasek, senior product line director for ATMI. "Now, with the Copper 2.0 and the CuChem, ATMI can supply complete solutions in this critical process, while helping our customers to produce higher quality semiconductors at a lower overall cost."

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