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Canon to integrate Asyst robot in lithography tools

Posted: 02 Aug 2002 ?? ?Print Version ?Bookmark and Share

Keywords:canon? UTX-F5500C? single-arm wafer-transfer robot?

Canon Inc. will incorporate Asyst Technologies Inc.'s UTX-F5500C single-arm wafer-transfer robot, with linear track, for its advanced step-and-scan lithography systems used in 248nm, 193nm, and 157nm wavelengths.

Asyst's claims its UTX-F5500C integrates high-speed ac motors and harmonic gear reduction to ensure smooth performance and high reliability in a production setting. As an option, the robot can be mounted on a linear track of various lengths. The robot is also available in a dual-arm configuration.

Hirofumi Sato, manager, Semiconductor Production Equipment Business Planning Division for Canon, said, "Optimizing the optical capabilities of these systems is our highest priority. The demonstrated throughput and productivity advantages of Asyst's UTX-F5500C robots, and the team's willingness to collaborate greatly simplified our choice."

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