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Micromanipulator offers double-sided probing solution

Posted: 23 Aug 2002 ?? ?Print Version ?Bookmark and Share

Keywords:micromanipulator? double sided probing? wafer probing? wafer prober? double sided prober?

Micromanipulator Co. has announced that its 8000 and 9000 series of probe stations will feature a double-sided probing capability, allowing the devices to probe the backside and frontside of wafers simultaneously. The double-sided probing is targeted for emission microscopy, optical device characterization, and MEMS analysis.

Double-sided probing allows designers to view the bottom of a wafer while probing the top and vice-versa, or set a charge on a contact point from either direction. The system also permits probing with ambient or thermal chucks.

The solution can accommodate 200mm or 300mm wafers used in the 8000 and 90000 series, respectively. Existing probing stations may be retrofitted with the new wafer carrier frame to allow double-sided probing.

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