Zygo receives product development contract
Keywords:metrology technology? lithography tool?
Zygo Corp. has signed a $29.69 million contract to develop a product utilizing metrology technology and application specific solutions for next-generation lithography tools. Construction has begun at Zygo on a facility capable of producing and testing products within extremely tight environmental specifications. The contract covers the period from January 2002 to February 2004.
"We are extremely pleased to be selected to develop this technology with significantly new, unmatched metrology capabilities. It is a reflection of the innovative skill of our people and the depth of our IP," said Carl Zanoni, SVP of Zygo. |
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