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SUSS wafer prober targets SAW substrates

Posted: 27 Sep 2002 ?? ?Print Version ?Bookmark and Share

Keywords:suss microtec? ap200saw? wafer test system? wafer probing system? saw wafer tester saw wafer prober?

The AP200SAW wafer test system from SUSS MicroTec GmBH is specifically designed to probe surface acoustic wave (SAW) substrates generally mounted on brittle wafers covered with thin metal layers down to 50nm.

Capable of testing wafers with diameters of up to 200mm, the automatic prober is based on the company's PA200 automatic probe system, a wafer loading module, and pre-aligner stations. The company's ProberBench OS and the SussCal calibration software controls both the prober and the test instrumentation to ensure complete automation.

SussCal is designed to perform remote one, two, and multi- port calibration with the most common vector network analyzers available on the market. Special software is also provided to automatically analyze the SAW characteristics and store the results for further evaluation.

Also provided are IZI probes, which are configured for up to 10GHz ground signal probing required for SAW. The probes' "finger-like" planar contacts are carefully placed onto the substrate ensuring highly repeatable contact even on metal layer thickness' down to 50nm.

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