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IMEC to establish 300mm silicon research foundry

Posted: 11 Oct 2002 ?? ?Print Version ?Bookmark and Share

Keywords:300mm silicon research platform? lithography clusters? imec? euv?

IMEC, an independent microelectronics R&D center in Europe, has laid its plans of setting up a 300mm silicon research platform initiative to perform advanced process research at least "two generations ahead of manufacturing." The local government of Belgium has already agreed to grant IMEC a funding of $37.18 million for the construction of the cleanroom.

The goal of IMEC's 300mm silicon research platform is to demonstrate novel device architectures and to conduct research on process steps and modules. The advanced process research is planned to run 2 to 3 technology nodes ahead of manufacturing.

According to IMEC, the research fab will be very flexible and will operate at ultra-short cycle time. It will be built around advanced lithography clusters such as 157nm and EUV. To share common facilities, infrastructure and metrology tools, and to use available human resources, the new fab will be located adjacent to current IMEC facilities.

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