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Toshiba's 300mm expansion to cost $3 billion

Posted: 17 Dec 2002 ?? ?Print Version ?Bookmark and Share

Keywords:toshiba? soc lsi? nor Flash memories? sram? fram?

Toshiba Corp. is eyeing a much-anticipated plan for 300mm manufacturing: a $2.9 billion endeavor that includes two fabs, one for SoC LSIs and another for memories.

Takeshi Nakagawa, SVP of Toshiba and company president and CEO of its semiconductor company, said: "As a world leader in semiconductors, Toshiba is determined to remain a driving force in technological innovation and in providing customers with excellent products and solutions. These new facilities will allow us to deploy industry-leading process technology that will reinforce our leadership in key growth markets."

Toshiba plans to construct one 300mm wafer fab near its Oita fab in Oita Prefecture, Kyushu, and another near its Yokkaichi fab in Aichi Prefecture. Construction is expected to begin next year and end in 2006.

New fabs, old locations

The present Oita fab is the production base of Toshiba's system-on-chip LSIs using 8-inch wafers. The construction of the 300mm Oita fab will begin next April. Sometime in fiscal 2004, the fab is scheduled to begin volume production with a capacity of 20,000 to 25,000 wafers a month at full operation. The fab will mainly manufacture SoC chips of 65nm node generation and then move to the 45nm node, a Toshiba spokesman said. Toshiba presented 65nm node devices at IEDM and intends to establish volume production technology by 2004 spring.

The Yokkaichi fab at present is Toshiba's memory production base where NAND and NOR Flash memories, SRAM, FRAM and high-speed DRAMs such as Rambus DRAMs are manufactured with a capacity of 70,000 8-inch wafers a month. The newly built 300mm fab will have the similar portfolio, and NAND will be the main products. The fab will have the same scale capacity as Oita fab, about 20,000-25,000 wafers a month. Volume production is scheduled to begin in 2006. Toshiba expects that Flash memories with the line width of 55nm will be the first products at the fab.

Toshiba officials did not discuss financing details or whether they are seeking partners for the 300mm expansion.

- Yoshiko Hara

EE Times





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