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INFICON acquisition expands process capabilities

Posted: 09 Jan 2003 ?? ?Print Version ?Bookmark and Share

Keywords:vacuum instrumentation? process control software? new vision systems? advanced process control? lithography analysis?

INFICON Holding AG, a manufacturer of vacuum instrumentation and process control software, has acquired privately-held New Vision Systems, a provider of advanced process control (APC) and lithography analysis for semiconductor manufacturing.

The acquisition of New Vision Systems expands INFICON's reach in the semiconductor fab by extending its range of process capabilities in the APC market to include lithography. New Vision develops and deploys a full suite of process control software compatible with tools from all major lithography and metrology equipment suppliers.

"Both INFICON and New Vision Systems have operated successfully in the same industry, serving many of the same customers," said James Brissenden, president and CEO. "Now, INFICON and New Vision Systems have come together to offer in-situ sensors, APC software, and process expertise for the analysis and optimization of essential processes. We plan to link these adjacent processes by creating feed-forward/feedback control for optimization of interrelated blocks of processes. We see this as a crucial element in the successful implementation of fab-wide process control systems."

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