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UMC extends licensing deal with Numerical Tech

Posted: 22 Jan 2003 ?? ?Print Version ?Bookmark and Share

Keywords:phase shifting technology? sub 100nm ic? umc? numerical? virtual stepper mask qualification software?

United Microelectronics Corp. (UMC) has extended its phase-shifting technology licensing agreement with Numerical Technologies Inc. as UMC migrates to the 90nm process-generation.

As part of the three-year agreement, the companies will continue their ongoing collaboration for technology development to facilitate production of sub-100nm ICs. UMC's 90nm process is expected to begin pilot production next quarter.

In addition to the licensing agreement, UMC also plans to deploy Numerical's Virtual Stepper mask qualification software as part of its standard production flow.

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