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SMI expands MEMS wafer facility

Posted: 23 Jan 2003 ?? ?Print Version ?Bookmark and Share

Keywords:wafer? silicon etching? pressure sensor? mems device?

Silicon Microstructures Inc. (SMI) has begun implementation of a previously announced plan for a major expansion and renovation of its recently purchased MEMS wafer foundry.

This project, scheduled to be completed in mid-2003, has started with the relocation of a portion of the company's silicon etch operations which was previously located in Hawthorne California, to the Milpitas facility. Additionally, SMI will upgrade its facility infrastructure by purchasing and installing new equipment, adding capacity to the company's pressure sensor, and MEMS foundry business.

The facility expansion program will also support SMI's plans to establish full capability for production of MEMS devices on 6-inch wafers. Further, processes that had previously been subcontracted such as some metal and thin-film depositions, will now be performed in-house.

This facility expansion project has been designed in phases to maintain full on-going production and qualification of new equipment.

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