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Samsung purchases Inficon sensor integration system

Posted: 03 Feb 2003 ?? ?Print Version ?Bookmark and Share

Keywords:infinicon holding? samsung electronics? fabguard? situ sensor? analysis system?

Inficon Holding AG, a manufacturer of vacuum instrumentation and process control software, has received orders valued at $2.6 million from Samsung Electronics Co. Ltd for its FabGuard Sensor Integration and Analysis System. Samsung will use the Inficon system for in situ metrology in a 300mm mass production fab.

The orders, which include in situ sensors, hardware, and software, mark the second contract for the FabGuard System from Inficon.

FabGuard and its multi-sensor platform provide fully automated, real-time fault detection and analysis expected to maximize productivity and equipment utilization, reducing losses from process drift, contamination, tool malfunction, and unnecessary test wafers.

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