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Shipley opens R&D facility for microelectronic materials

Posted: 07 Feb 2003 ?? ?Print Version ?Bookmark and Share

Keywords:shipley? electronic materials? process technology? lithography? interconnect?

Shipley Co. L.L.C., a provider of electronic materials and process technology development, has opened its Advanced Technology Center (ATC) in Marlborough, Massachusetts. The facility is dedicated to the development of lithography, interconnect, low-k dielectric, and other critical materials needed to produce the newest generations of microelectronic devices.

Initial ATC programs are focused on the fast-cycle development of new 193nm photoresists and anti-reflectant coatings used in photolithographic processes. Additional programs are expected to focus on the continued development and integration of low-k dielectrics, copper interconnect and later generation lithography materials supporting 157nm, extreme ultraviolet (EUV), and e-beam technologies.

The new 65,000-square-foot ATC building represents the first phase of Shipley's multiphase plans for the center.





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