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Exitech to use Brooks-PRI handling systems

Posted: 11 Feb 2003 ?? ?Print Version ?Bookmark and Share

Keywords:exitech? brooks-pri? gemini express 5000? vacuum handling system? euv lithography system?

U.K.-based Exitech Ltd, a developer of photon-based tools for emerging industrial micro fabrication tasks, has purchased two of Brooks-PRI Automation Inc.'s Gemini Express 5000 (GX5000) vacuum handling systems, including supervisory level software for controlling the systems.

Exitech will integrate the GX5000 tools with its EUV lithography system and a track system from a major capital equipment supplier. International Sematech will be using the integrated EUV systems for their advanced lithography R&D programs.

As a bridge tool, the Gemini Express wafer handling system is configurable to handle both 200mm and 300mm wafer sizes without requiring users to make hardware or software modifications. It also provides atmospheric front-end connectivity to a configurable vacuum cluster back-end.

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