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Ultratech adopts TMC vibration control system

Posted: 11 Feb 2003 ?? ?Print Version ?Bookmark and Share

Keywords:ultratech stepper? technical mfg? electro-damp II active vibration control system? saturn spectrum? titan wafer stepper?

Ultratech Stepper Inc. has chosen Technical Mfg Corp.'s Electro-Damp II Active Vibration Control System as the new platform for its 200mm and 300mm Saturn Spectrum and Titan Wafer Stepper family.

Each patented Electro-Damp II system will include TMC's DC-2000 digital controller, non-contacting electronic valving system, Gimbal Piston isolator, and high force linear motors. The isolation system will be incorporated into an engineered frame, also made by TMC, which will be the foundation of the tool.

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