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YES to develop 300mm process tool platform for Adept

Posted: 04 Mar 2003 ?? ?Print Version ?Bookmark and Share

Keywords:yield engineering systems? adept? semiconductor process equipment? vacuum cure oven process?

Yield Engineering Systems Inc. (YES) has selected Adept Technology Inc. to develop a new 300mm process tool platform that will fully automate its vacuum cure oven process.

The YES-450PBX4-300 platform will utilize the Adept SmartController CS controller, AdeptSix 6-axis robot, and the Adept SmartModule linear modules that will all link via Adept's SmartServo FireWire based distributed network. The 300mm system will be designed for high temperature cure of polyimide or BCB and copper anneals.

"After considerable research we concluded that Adept's FireWire-based network coupled with their reliable motion controls, linear modules and 6-axis robots would allow us to provide our customers with the most cost-effective solution on the market," said Bill Moffat CEO for YES. "We believe this new fully-automated vertical laminar flow polyimide bake solution will provide the best process for the curing of both polyimide or BCB, as well as copper anneal."





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