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Cymer breaks ground in new Korea facility

Posted: 10 Mar 2003 ?? ?Print Version ?Bookmark and Share

Keywords:cymer? excimer light source? semiconductor manufacturing? advanced deep-ultraviolet light source? lithography?

Cymer Inc., a supplier of excimer light sources used in semiconductor manufacturing, has officially opened its new chamber refurbishment facility in South Korea's Eoyeon-Hansan Industrial Park. The 25,000-square-foot facility will serve as Cymer's first international chamber refurbishment hub for the company's entire line of advanced deep-ultraviolet (DUV) light sources.

"As the industry enters into the 'Golden Age of DUV' lithography, it is imperative that Cymer is readily able to support worldwide demand for DUV light sources," commented Pascal Didier, Cymer's president and CEO. "With more than half of our substantial global installed base located in Asia, this dedicated chamber refurbishment facility in Korea further ensures we are equipped with the necessary infrastructure that our customers have come to expect."

Located in close proximity to key chipmakers, the facility in Korea features a Class 10,000 cleanroom and duplicates the safety standards employed at Cymer's manufacturing facility in the U.S. The facility has already commenced production, shipping the first chamber to a Korea-based manufacturer of DRAM devices.

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