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Cameca probe equipment integrates Cimetrix tool

Posted: 24 Mar 2003 ?? ?Print Version ?Bookmark and Share

Keywords:cameca cimetrix? semiconductor wafer manufacturing? shallow probe equipment?

Cameca, a France-based developer of low energy x-ray emission spectrometry (LEXES) microanalysis for semiconductor wafer manufacturing, will utilize Cimetrix Inc.'s CIM300 and CIMConnect in its 300mm shallow probe equipment. The integration of the Cimetrix software is expected to enable Cameca to quickly develop communication interfaces on their LEXFAB Shallow Probe.

Cameca's shallow probe is based on the non-destructive LEXES and is designed to meet the needs for quantitative elemental measurement in the first nanometers below the surface, and with Cimetrix's software, will be used in a fully automated 300mm wafer analysis cleanroom environment.

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