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Samsung deploys KLA-Tencor system for sub-130nm processes

Posted: 24 Mar 2003 ?? ?Print Version ?Bookmark and Share

Keywords:samsung electronics? kla-tencor? spectrafx 100 system? memory chip?

Samsung Electronics Co. Ltd has purchased a 300mm optical thin-film metrology tool from KLA-Tencor Corp. The system, which is part of KLA-Tencor's latest-generation of SpectraFx 100 systems, will be installed in Samsung's facility in Kyunggi-Do, South Korea, to support the production of sub-130nm high-density memory products.

"Manufacturing advanced memory devices at these design rules require that we use very complex semiconductor films that are extremely thin and that must meet exacting specifications," stated Dr. Choon-Sam Jeon, senior manager of Samsung's Advanced Materials team. "Maintaining thin-film process uniformity during the production of these devices is essential, since the slightest process deviation can seriously impair device performance. KLA-Tencor's SpectraFx 100 system has demonstrated the precision and accuracy needed to monitor our thin-film processes during production and help ensure the manufacturability of our latest-generation products."





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