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UMC begins production of 90nm-based ICs

Posted: 03 Apr 2003 ?? ?Print Version ?Bookmark and Share

Keywords:umc? customer ic? 90nm logic process?

Semiconductor foundry United Microelectronics Corp. (UMC) has started pilot production of customer ICs based on its recently developed 90nm logic process. The company expects to move customer wafers to volume production later this year. UMC's 90nm process incorporates up to 9 copper metal layers, triple gate oxide and other advanced features.

UMC's experience at the 0.135m generation has helped smooth the transition to 90nm production. Many of the materials and techniques that were first introduced at the 0.135m generation also apply to 90nm, including copper interconnects and low-k dielectric materials.

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