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ASML receives order for 157nm tool from IMEC

Posted: 07 Apr 2003 ?? ?Print Version ?Bookmark and Share

Keywords:asml holding? imec? nanometer step-and-scan tool?

ASML Holding NV has delivered a 157nm step-and-scan tool to independent R&D chip consortium, Interuniversity MicroElectronic Center (IMEC). Called the Micrascan VII, the new system is a full-field tool that is capable of creating working chips.

Along with full imaging functionality, the Micrascan VII incorporates several other solutions to address the challenges of 157nm lithography. Such solutions include increased photoresist process range, flexible imaging, contamination control, and purge.

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