Applied Materials enhances process capabilities

With Applied Materials Inc.'s acquisition of all outstanding stock of Boxer Cross Inc., a provider of in-line monitoring systems that provide users with critical electrical measurement data for controlling semiconductor processes, they have solidified their objective of enhancing their process, diagnostic capabilities.

Boxer Cross' products include the BX-10 Source/Drain and Ultra-Shallow Junction Measurement System and the BX-30 Advanced Interconnect Measurement System. Both products provide critical in-line electrical measurements on 200mm and 300mm product wafers to detect implant/anneal (BX-10) and dual damascene copper (BX-30) process variations.

"In addition to strengthening our portfolio of metrology and inspection systems, Boxer Cross' products are expected to add significant value to our process technologies," said Dr. Gilad Almogy, VP and GM of Applied Materials' Process Diagnostic and Control group. "As Applied Materials further develops integrated solutions and modules, the close coupling of metrology and process systems should substantially reduce cycle time in providing new, more efficient solutions for our customers."