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Entegris deploys new wafer testing machine

Posted: 04 Jun 2003 ?? ?Print Version ?Bookmark and Share

Keywords:Entegris? wafer analyzer? silicon wafers?

Entegris Inc. has installed a new surface wafer analyzer which is expected to enhance the company's current capabilities in characterizing surface organics on 300mm silicon wafers. The new surface wafer analyzer is part of the company's Materials Technology Laboratory (MTL) where Entegris has developed its expertise in polymer materials characterization and applications.

Entegris' surface wafer analyzer employs thermal desorption technology that provides complete extraction of organic compounds from the surface of 300mm (and below) silicon wafers for subsequent analysis via gas chromatography/mass spectrometry (GC/MS). These surface characterization techniques are used by Entegris to identify organic contamination issues which otherwise may not be apparent to Entegris' customers until many costly steps later in the semiconductor manufacturing process.

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