Axcelis acquires dry strip equipment provider

Axcelis Technologies Inc. has acquired Matrix Integrated Systems Inc., a photoresist dry strip equipment supplier, for $14 million in cash. The acquisition expands and strengthens Axcelis' dry strip technology portfolio and supports the company's long-term diversification strategy.

"Matrix is well known for its fast and reliable dry strip platform, particularly in front-end-of-line applications, as well as its talented technology development team," said Mary Puma, president and CEO of Axcelis. "When we combine these strengths with Axcelis' back-end-of-line dry strip with our new ES3Lk system, we end up with a unique, comprehensive product portfolio for the full range of dry strip needs in transistor and interconnect formation."