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Schlumberger, LSI announce joint development program

Posted: 16 Jul 2003 ?? ?Print Version ?Bookmark and Share

Keywords:schlumberger verification system? lsi logic? ultra low voltage? process node? cd-sem?

Schlumberger Verification Systems, a unit of Schlumberger Ltd, and LSI Logic Corp. have established a joint development program (JDP) in advanced metrology for the 65nm process node. As a part of the JDP, a Yosemite ultra low voltage CD-SEM will be installed at LSI Logic's Gresham, Oregon fabrication facility within the Advanced Process Development Group. The research program will target the technology hurdles represented by the 65nm process node through the application of the Yosemite CD-SEM's unique capabilities.

"Given the far reaching potential of Ultra Low Voltage, and its importance in the ITRS Roadmap, we are eager to examine the benefits offered by Yosemite," said Richard Schinella, VP of research and development, LSI Logic, Gresham, Oregon. "Yosemite's capability to address fundamental metrology issues such as ArF resist line slimming, low-k dielectric charging, repeatability, and accuracy should have a strong impact in promoting faster process development cycles," he added.





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