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ATMI, Air Liquide to promote packaging technology

Posted: 17 Jul 2003 ?? ?Print Version ?Bookmark and Share

Keywords:atmi? air liquide? sage? gas packaging? semiconductor?

ATMI Inc. and Air Liquide have formed an alliance to promote the productivity and safety benefits of the SAGE (Sub-Atmospheric Gas Enhanced) gas packaging process to the semiconductor industry.

Air Liquide will integrate ATMI's unique sub-atmospheric gas packaging technology into its semiconductor offerings for silicon CVD processes. SAGE gas sources simplify the delivery of dopant gases to process tools, while optimizing safety. Sub-atmospheric gas sources are recommended by the National Fire Protection Association's NFPA 318 standard.

Jean-Marc Girard, Air Liquide Materials Solutions Manager, said, "Combining a highly consistent pure gas source with ATMI's sub-atmospheric gas packaging and our Total Gas and Chemical Management service certainly provides the highest level of process reliability and safety to our worldwide customers. Teaming up with ATMI on SAGE products allows Air Liquide to offer the most complete gas supply solution."

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