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DSP-based controller improves signal response

Posted: 29 Aug 2003 ?? ?Print Version ?Bookmark and Share

Keywords:npoint? dsp controller? digital signal processor controller?

nPoint Inc. has introduced the 300-series of DSP (digital signal processor) controllers. The DSP-based controller is designed for use in critical dimension measurements on semiconductors and semiconductor masks, atomic force microscopy, and other scanning probe instruments.

The DSP Controller uses PID (proportional-integral-differential) control algorithms and an integral capacitive position sensor to achieve precise closed-loop controller nanopositioning with a high degree of application flexibility.

It also offers enhanced response time without altering the accuracy and repeatability of the nanopositioner, and its low-noise capacitive sensing module and 20-bit resolution offers sub-nanometer resolution up to 200?m range of motion.

Compatible with all nPoint nanopositioners, the 300-series is offered with a USB interface and a high-speed parallel interface option.

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