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MKS expands vacuum gauging technology with acquisition

Posted: 03 Oct 2003 ?? ?Print Version ?Bookmark and Share

Keywords:mks instruments? process control technologies? wenzel instruments? vacuum sensors?

MKS Instruments Inc., a provider of process control technologies has acquired MEMS-based technology through the acquisition of Denmark-based Wenzel Instruments.

The acquired technology includes a new generation of solid state MEMS-based vacuum sensors for vacuum applications such as loadlock control in gas-based manufacturing processes in semiconductor, flat-panel and data storage, biotech, and pharmaceutical markets.

The acquisition has augmented MKS' HPS product line with a Piezo sensor for atmosphere sensing and a MicroPirani solid-state thermal conductivity vacuum gauge for rough to medium vacuum measurement. In addition, MKS has integrated the MEMS sensors into a number of its advanced instrumentation products.

"Most vacuum gauges on the market today are based on technology developed decades ago," said Bill Stewart, VP and general manager, MKS Vacuum Products Group. "Today's advanced manufacturing processes require process control sensors with higher accuracy and faster response in a smaller footprint. By acquiring innovative micro-machined pirani and piezo electric transducer technology, we are expanding our vacuum gauge product line offering to meet these demands."

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