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Samsung to deploy MKS ozone generator subsystems

Posted: 07 Oct 2003 ?? ?Print Version ?Bookmark and Share

Keywords:samsung electronics? mks instruments? ozone generator subsystem? atomic layer deposition? ald?

Samsung Electronics Co. Ltd has selected MKS Instruments Inc.'s Semozon ozone generator subsystems for use in next-generation atomic layer deposition (ALD) applications.

According to Samsung, the MKS generators were chosen because of their compact size, modular design and ability to deliver ultra high concentrations of ozone to ALD processes. ALD is an emerging, high-growth technology that, unlike traditional chemical vapor deposition (CVD) processes, deposits very thin layers of materials one layer at a time, allowing more precise control of film thickness and composition. According to industry forecaster VLSI Research, ALD systems are forecast to grow at a 65.5 percent compound annual growth rate through 2008.

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