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Nantero, ASML team on process compatibility

Posted: 29 Oct 2003 ?? ?Print Version ?Bookmark and Share

Keywords:Nantero? ASML Holding? nanotube materials? semiconductor equipment?

Nantero Inc. has announced a collaborative project with ASML Holding NV to demonstrate compatibility between its nanotube materials and processes and ASML's semiconductor equipment.

The project has been ongoing since early 2003 in ASML's research fab with a joint team from Nantero and from ASML's Special Applications Group. The project has already demonstrated that ASML's equipment is fully capable of handling nanotubes using Nantero protocols and of carrying out Nantero's new manufacturing steps without any modifications.

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