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EV Group made strategic supplier by DALSA

Posted: 20 Nov 2003 ?? ?Print Version ?Bookmark and Share

Keywords:EV Group? EVG? DALSA Semiconductor? semiconductor wafer processing equipment? wafer foundry services?

EV Group (EVG), a manufacturer of MEMS, nano- and semiconductor wafer processing equipment, has been selected by Dalsa Semiconductor as the strategic supplier for MEMS wafer bonding and thick polymer lithography semiconductor production equipment. Dalsa is a supplier of custom wafer foundry services.

Initially, EVG will provide Dalsa with the Gemini Wafer Bonder Cluster tool and the Hercules Thick Polymer Lithography tool customized to Dalsa's specifications. These two systems will be the key to move MEMS into the High Volume Manufacturing (HVM) spotlight. Later, the two parties intend to

cooperate to enhance the capabilities of the equipment sub-modules to handle new materials and processes. Dalsa expects preliminary equipment operation in 4 to 6 months.

These two high volume production systems from EVG are expected to enhance Dalsa's MEMS production capabilities, especially in the areas of Intelligent MEMS and low temperature process.





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