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Therma-Wave, Tokyo Electron partner on CD metrology developments

Posted: 22 Dec 2003 ?? ?Print Version ?Bookmark and Share

Keywords:therma-wave? tokyo electron? tel? cd metrology?

Therma-Wave Inc., a semiconductor metrology company, has received a multi-system, multi-million dollar order from Tokyo Electron (TEL). Under the terms of the order, Therma-Wave's advanced INTEGRA CD metrology products will be used with TEL's CLEAN TRACK ACT and CLEAN TRACK LITHIUS series of coater/developer products.

To further capitalize on CD opportunities, Therma-Wave and TEL plan to refocus their development resources accordingly. At the same time, both companies stated their agreement to discontinue their joint development program (JDP) on overlay technology applications. Therma-Wave will continue to address long-term market overlay opportunities.

The decision to refocus the joint development efforts was made in large part because of the success and growing demand for advanced integrated CD metrology applications and the expanding market opportunities in this area.





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